Siconnex
BATCHSPRAY® Autoload

A fully automated solution.

Siconnex BATCHSPRAY® Autoload is used to automatically load and unload acid and solvent systems. The effective use of our fully automated robot systems enables very high throughputs to be achieved, while the closed design helps to keep the products clean. Available for 8“ and 12“ substrate sizes.

Advantages

  • Automated dry-in, dry-out process
  • Compatibility with SMIF, FOUP and standard carriers
  • Throughput of up to 400 wph
  • Equipment footprint < 9 m2
  • Fully automated robot loading
  • Flush mounting possible thanks to the completely enclosed design

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Etch

  • Metal Etch (Al, Cu, Ti, Au, Ni,…) with End Point Detection
  • III/V Etch (GaAs, AlGaAs, InGaP,…)
  • Oxide Etch
  • Freckle Etch
  • Germanium Etch
  • Silicon Backside Etch
  • Siliconnitride Etch
  • Aluminiumnitride Etch
  • UBM Etch (Ag, Ni, Ti,..)
  • Glass Etch
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Clean

  • SicOzoneTM Clean
  • SicOzoneTM + Ultra Diluted Clean Applications
  • Contact Cleans
  • Organic Removal & Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
  • Hydrogen Fluoride Last
  • Prediffusion Cleans
  • Field Cleans (Organic & Inorganic Cleans)
  • Polymer Clean
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Resist Strip

  • SicOzoneTM Strip
  • Positive and Negative Resist Strip
  • Implanted Photo Resist Strip
  • Sulfurice Ozone Mixture Strip
  • Resist Rework

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Resist Developing

  • Photoresist Developing
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Siconnex Worldwide

Siconnex Austria

Siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com

Siconnex France

83 Rue roger du Marais
38430 Moirans
Tel: +33 631 30 55 54
Email: france@siconnex.com

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2

11700 Gelugor Penang
Tel: +6 012 4256568
Email: malaysia@siconnex.com

Siconnex America

Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas
Tel: +1 469 465 7831
Email: america@siconnex.com

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01

049908 Singapore
Tel: +65 838 88977
Email: singapore@siconnex.com

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