A fully automated solution.

Siconnex BATCHSPRAY® Autoload is used to automatically load and unload acid and solvent systems. The effective use of our fully auto- mated robot systems enables very high throughputs to be achieved, while the closed design helps to keep the products clean.


  • Automated dry-in, dry-out process
  • Compatibility with SMIF, FOUP and standard carriers
  • Throughput of up to 400 wph
  • Equipment footprint < 9 m2
  • Fully automated robot loading
  • Flush mounting possible thanks to the completely enclosed design

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  • Metal Etch (Al, Cu, Ti, Au, Ni,…) with End Point Detection
  • III/V Etch (GaAs, AlGaAs, InGaP,…)
  • Oxide Etch
  • Freckle Etch
  • Silicon Stress Relief
  • Ge Etch
  • Nitride Etch
  • UBM Etch
  • Glass Etch
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  • SicOzoneTM Clean
  • SicOzoneTM + Ultra Diluted Clean Applications
  • Contact Cleans
  • Organic Removal & Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
  • HF Last
  • Prediffusion Cleans
  • Field Cleans (Organic & Inorganic Cleans)
  • Polymer Clean
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Resist Strip

  • SicOzoneTM Strip
  • Positive and Negative Resist Strip
  • Implanted Photo Resist Strip
  • Enhanced Strip Resist Rework
  • Positive Resist Strip
  • Negative Resist Strip

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Resist Developing

  • Photoresist Developing

Siconnex Worldwide

Siconnex Austria

Siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146

Siconnex France

83 Rue roger du Marais
38430 Moirans
Tel: +33 631 30 55 54

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2

11700 Gelugor Penang
Tel: +6 012 4256568

Siconnex America

Siconnex America Inc.
3010 LBJ Freeway Suite 1200
75234 Dallas, Texas
Tel: +1 214 710 2469

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01

049908 Singapore
Tel: +65 838 88977

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