BATCHSPRAY^®

Solvent

Autoload

Intelligent wafer handling meets experienced wafer processing.

A robot transfers the wafer batch from loadport into the process chamber.

Thanks to a clever assembly of process modules, we achieve two process chambers.

Small process module footprint combined with smart wafer handling.

Processes for SiC and GaN substrates are available.

Recirculation of the chemical provides a stable temperature and concentration condition.

For enhanced wafer handling efficiency, we offer dedicated handlers specifically designed for dirty in/clean out processes. These specialized handlers ensure optimal cleanliness and prevent cross-contamination, maintaining the highest standards of wafer integrity.

To capture your unique process requirements, our equipment includes dedicated handlers for both left and right process chambers. This tailored approach maximizes workflow flexibility, enabling seamless integration into your existing setup for improved productivity and convenience.