Siconnex BATCHSPRAY® Solvent
An investment in the future.
Siconnex BATCHSPRAY® Solvent can process different types of solvents. The system is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. Siconnex BATCHSPRAY® Solvent is for substrates of 2” to 12“ and is also compatible with Siconnex BATCHSPRAY® Autoload and the patented Retainer Comb Handling (RCH) System.
Advantages
- Automated dry-in, dry-out process
- 25 or 50 Wafer chamber availability
- Left and right frame availability
- Less floorspace, due to 3 side service access
- Compatible with Autoload robot handling and the patented RCH System
- Accurate and powerful chemical in-line heaters
- Tank chiller units for temperature control
- Bigger tank volume
- Direct process system for additional chemistry
- Extendible process chamber for easier service access
Clean
- Polymer Clean
- Etch Residue Clean
- Post Ash Residue Clean
Resist Strip
- Positive Resist Strip
- Negative Resist Strip
Resist Developing
- Photoresist Developing
Siconnex Worldwide
siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com
Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831
Email: america@siconnex.com
Siconnex America Inc.
2345 Route 52, Suite 2-C
12533 Hopewell Junction, New York, USA
Tel: +1 469 465 7831
Email: america@siconnex.com
83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54
Email: france@siconnex.com
3-2-17-202 Jiyugaoka
Meguro-ku Tokyo
152-0035 Tokyo
Tel: +81 343462435
Email: japan@siconnex.com
Siconnex Malaysia Sdn. Bhd.
No. 1 – 04 – 15 E-Gate Lebuh Tunku Kudin 2
11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568
Email: malaysia@siconnex.com
Siconnex Singapore Pte. Ltd.
60 Paya Lebar Rd. #05-07 Paya Lebar Square
409051 Singapore, Singapore
Tel: +65 31051762
Email: singapore@siconnex.com
