Siconnex BATCHSPRAY^® Solvent can process different types of solvents. The system is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. Siconnex BATCHSPRAY^® Solvent is for substrates of 2” to 12“ and is also compatible with Siconnex BATCHSPRAY^® Autoload.

Advantages

• Automated dry-in, dry-out process
• 25 or 50 Wafer chamber availability
• Left and right frame availability
• Less floorspace, due to 3 side service access
• Compatible with Autoload robot handling
• Accurate and powerful chemical in-line heaters
• Tank chiller units for temperature control
• Bigger tank volume
• Direct process system for additional chemistry
• Extendible process chamber for easier service access