Efficiency has a name.

Siconnex BATCHSPRAY® Acid is designed for acids and bases. It can be loaded manually or combined with Siconnex BATCHSPRAY® Autoload and the patented Retainer Comb Handling (RCH) System. The equipment is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. The Siconnex BATCHSPRAY® Acid can process wafer sizes of 2“ to 12“.


  • Automated dry-in, dry-out process
  • Five processes possible in one sequence
  • Repeatability thanks to process control
  • Equipment footprint of 1.2 m x 2 m
  • Up to 80% less DI water
  • Up to 80% reduction in process media
  • Closed system
  • User safety
  • Chemical mixing management system

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  • Metal Etch (Al, Cu, Ti, Au, Ni,…) with End Point Detection
  • III/V Etch (GaAs, AlGaAs, InGaP,…)
  • Oxide Etch
  • Freckle Etch
  • Germanium Etch
  • Silicon Backside Etch
  • Siliconnitride Etch
  • Aluminiumnitride Etch
  • UBM Etch (Ag, Ni, Ti,..)
  • Glass Etch
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  • SicOzone Clean
  • SicOzone + Ultra Diluted Clean Applications
  • Contact Cleans
  • Organic Removal & Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
  • Hydrogen Fluoride Last
  • Prediffusion Cleans
  • Field Cleans (Organic & Inorganic Cleans)
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Resist Strip

  • SicOzone Strip
  • Positive and Negative Resist Strip
  • Implanted Photo Resist Strip
  • Sulfurice Ozone Mixture Strip
  • Resist Rework

The SicOzone-Process

A win-win-win-situation

Cleans and strips resist from substrates.
No need for expensive solvents that are harmful to health.
Ozone is cheap to produce from oxygen.

All good things come in threes. In other words, it is a win-win-win situation!

Siconnex Worldwide

Siconnex Austria

siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146

Siconnex America Texas - US Headquarters

Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831

Siconnex America New York

Siconnex America Inc.
2345 Route 52, Suite 2-C
12533 Hopewell Junction, New York, USA
Tel: +1 469 465 7831

Siconnex France

83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54

Siconnex Japan G.K.

3-2-17-202 Jiyugaoka
Meguro-ku Tokyo
152-0035 Tokyo
Tel: +81 343462435

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No. 1 – 04 – 15 E-Gate Lebuh Tunku Kudin 2
11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
60 Paya Lebar Rd. #05-07 Paya Lebar Square
409051 Singapore, Singapore
Tel: +65 31051762

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