Siconnex
BATCHSPRAY® Acid
Efficiency has a name.
Siconnex BATCHSPRAY® Acid is designed for acids and bases. It can be loaded manually or combined with Siconnex BATCHSPRAY® Autoload and the patented Retainer Comb Handling (RCH) System. The equipment is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. The Siconnex BATCHSPRAY® Acid can process wafer sizes of 2“ to 12“.
Advantages
- Automated dry-in, dry-out process
- Five processes possible in one sequence
- Repeatability thanks to process control
- Equipment footprint of 1.2 m x 2 m
- Up to 80% less DI water
- Up to 80% reduction in process media
- Closed system
- User safety
- Chemical mixing management system
Etch
- Metal Etch (Al, Cu, Ti, Au, Ni,…) with End Point Detection
- III/V Etch (GaAs, AlGaAs, InGaP,…)
- Oxide Etch
- Freckle Etch
- Germanium Etch
- Silicon Backside Etch
- Siliconnitride Etch
- Aluminiumnitride Etch
- UBM Etch (Ag, Ni, Ti,..)
- Glass Etch
Clean
- SicOzone Clean
- SicOzone + Ultra Diluted Clean Applications
- Contact Cleans
- Organic Removal & Clean
- Etch Residue Clean
- Post Ash Residue Clean
- Hydrogen Fluoride Last
- Prediffusion Cleans
- Field Cleans (Organic & Inorganic Cleans)
Resist Strip
- SicOzone Strip
- Positive and Negative Resist Strip
- Implanted Photo Resist Strip
- Sulfurice Ozone Mixture Strip
- Resist Rework
The SicOzone-Process
A win-win-win-situation
Cleans and strips resist from substrates.
No need for expensive solvents that are harmful to health.
Ozone is cheap to produce from oxygen.
All good things come in threes. In other words, it is a win-win-win situation!
Siconnex Worldwide
siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com
Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831
Email: america@siconnex.com
Siconnex America Inc.
2345 Route 52, Suite 2-C
12533 Hopewell Junction, New York, USA
Tel: +1 469 465 7831
Email: america@siconnex.com
83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54
Email: france@siconnex.com
3-2-17-202 Jiyugaoka
Meguro-ku Tokyo
152-0035 Tokyo
Tel: +81 343462435
Email: japan@siconnex.com
Siconnex Malaysia Sdn. Bhd.
No. 1 – 04 – 15 E-Gate Lebuh Tunku Kudin 2
11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568
Email: malaysia@siconnex.com
Siconnex Singapore Pte. Ltd.
60 Paya Lebar Rd. #05-07 Paya Lebar Square
409051 Singapore, Singapore
Tel: +65 31051762
Email: singapore@siconnex.com
