Siconnex BATCHSPRAY® Solvent 2.0

An investment in the future.

Siconnex BATCHSPRAY® Solvent can process different types of solvents. The system is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. Siconnex BATCHSPRAY® Solvent is for substrates of 2” to 12“ and is also compatible with Siconnex BATCHSPRAY® Autoload.

Advantages

  • Automated dry-in, dry-out process
  • 25 or 50 Wafer chamber availability
  • Left and right frame availability
  • Less floorspace, due to 3 side service access
  • Compatible with Autoload robot handling
  • Accurate and powerful chemical in-line heaters
  • Tank chiller units for temperature control
  • Bigger tank volume
  • Direct process system for additional chemistry
  • Extendible process chamber for easier service access

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Clean

  • Polymer Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
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Resist Strip

  • Positive Resist Strip
  • Negative Resist Strip
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Resist Developing

  • Photoresist Developing
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Siconnex Worldwide

Siconnex Austria

Siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com

Siconnex France

83 Rue roger du Marais
38430 Moirans
Tel: +33 631 30 55 54
Email: france@siconnex.com

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2

11700 Gelugor Penang
Tel: +6 012 4256568
Email: malaysia@siconnex.com

Siconnex America

Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas
Tel: +1 469 465 7831
Email: america@siconnex.com

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01

049908 Singapore
Tel: +65 838 88977
Email: singapore@siconnex.com

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