Siconnex BATCHSPRAY® Solvent

An investment in the future.

Siconnex BATCHSPRAY® Solvent can process different types of solvents. The system is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. Siconnex BATCHSPRAY® Solvent is for substrates of 2” to 12“ and is also compatible with Siconnex BATCHSPRAY® Autoload and the patented Retainer Comb Handling (RCH) System.


  • Automated dry-in, dry-out process
  • 25 or 50 Wafer chamber availability
  • Left and right frame availability
  • Less floorspace, due to 3 side service access
  • Compatible with Autoload robot handling and the patented RCH System
  • Accurate and powerful chemical in-line heaters
  • Tank chiller units for temperature control
  • Bigger tank volume
  • Direct process system for additional chemistry
  • Extendible process chamber for easier service access

Section Image


  • Polymer Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
Section Image

Resist Strip

  • Positive Resist Strip
  • Negative Resist Strip
Section Image

Resist Developing

  • Photoresist Developing

Siconnex Worldwide

Siconnex Austria

siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146

Siconnex America Texas - US Headquarters

Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831

Siconnex America New York

Siconnex America Inc.
2345 Route 52, Suite 2-C
12533 Hopewell Junction, New York, USA
Tel: +1 469 465 7831

Siconnex France

83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54

Siconnex Japan G.K.

3-2-17-202 Jiyugaoka
Meguro-ku Tokyo
152-0035 Tokyo
Tel: +81 343462435

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No. 1 – 04 – 15 E-Gate Lebuh Tunku Kudin 2
11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
60 Paya Lebar Rd. #05-07 Paya Lebar Square
409051 Singapore, Singapore
Tel: +65 31051762

You are using an outdated browser.
You are using an incompatible browser.

Modern Browsers are:

Mozilla Firefox

Mozilla Firefox

Mozilla Firefox

Google Chrome

This website uses cookies to ensure you get the best experience on our website. If you continue to use this site we will assume that you are happy with it. More about data privacy.