Siconnex BATCHSPRAY® Solvent 2.0

An investment in the future.

Siconnex BATCHSPRAY® Solvent can process different types of solvents. The new model BATCHSPRAY® Solvent 2.0 is for substrates of 2” to 12“ and will also be compatible with BATCHSPRAY® Autoload.

Advantages

  • For 2” to 12” substrates
  • 25 or 50 Wafer chamber availability
  • Left and right frame availability
  • Less floorspace, due to 3 side service access
  • Compatible with Autoload robot handling
  • Standardized facility connections
  • Accurate and powerful chemical in-line heaters
  • Tank chiller units for temperature control
  • High flow tank availability
  • Bigger tank volume
  • Up to 4 process tanks
  • Direct process system for additional chemistry
  • Extendible process chamber for easier service access

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Clean

  • Polymer Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
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Resist Strip

  • Positive Resist Strip
  • Negative Resist Strip
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Resist Developing

  • Photoresist Developing
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Siconnex Worldwide

Siconnex Austria

Siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com

Siconnex France

83 Rue roger du Marais
38430 Moirans
Tel: +33 631 30 55 54
Email: france@siconnex.com

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2

11700 Gelugor Penang
Tel: +6 012 4256568
Email: malaysia@siconnex.com

Siconnex America

Siconnex America Inc.
3010 LBJ Freeway Suite 1200
75234 Dallas, Texas
Tel: +1 214 710 2469
Email: america@siconnex.com

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01

049908 Singapore
Tel: +65 838 88977
Email: singapore@siconnex.com

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