Siconnex
BATCHSPRAY® Clean Autoload

High process performance through automation

The four-chamber clean system is automatically load and unload with Siconnex BATCHSPRAY® Autoload. The effective use of our fully automated robot systems with the patented Retainer Comb Handling (RCH) transfer equipment enables very high throughputs to be achieved, while the closed design helps to keep the products clean. Available for 8“ substrate sizes.

Advantages

  • Impressive process performance with the patented RCH System
  • Automated dry-in, dry-out process
  • Compatibility with SMIF, FOUP and standard carriers
  • Throughput of up to 400 wph
  • Equipment footprint < 9 m2
  • Fully automated robot loading
  • Flush mounting possible thanks to the completely enclosed design
  • Impressive process performance with the patented RCH System
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Clean

  • SicOzone Clean
  • SicOzone + Ultra Diluted Clean Applications
  • Organic Removal & Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
  • Prediffusion Cleans
  • Field Cleans (Organic & Inorganic Cleans)
  • Polymer Clean
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Resist Strip

  • SicOzone Strip
  • Positive and Negative Resist Strip
  • Implanted Photo Resist Strip
  • Resist Rework
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Siconnex Worldwide

Siconnex Austria

Siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com

Siconnex France

83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54
Email: france@siconnex.com

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2

11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568
Email: malaysia@siconnex.com

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01

049908 Singapore, Singapore
Tel: +65 838 88977
Email: singapore@siconnex.com

Siconnex America

Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831
Email: america@siconnex.com

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