Siconnex
BATCHSPRAY® Clean Autoload
High process performance through automation
The four-chamber clean system is automatically loaded and unloaded with Siconnex BATCHSPRAY® Autoload. The effective use of our fully automated robot system with the patented Retainer Comb Handling (RCH) transfer system enables very high throughputs to be achieved, while the closed design helps to keep the products clean. Available for 8“ substrate sizes.
Advantages
- Impressive process performance with the patented RCH System
- Automated dry-in, dry-out process
- Compatibility with SMIF, FOUP and standard carriers
- Throughput of up to 400 wph
- Equipment footprint < 9 m2
- Fully automated robot loading
- Flush mounting possible thanks to the completely enclosed design
- Impressive process performance with the patented RCH System
Clean
- SicOzone Clean
- SicOzone + Ultra Diluted Clean Applications
- Organic Removal & Clean
- Etch Residue Clean
- Post Ash Residue Clean
- Prediffusion Cleans
- Field Cleans (Organic & Inorganic Cleans)
- Polymer Clean
Resist Strip
- SicOzone Strip
- Positive and Negative Resist Strip
- Implanted Photo Resist Strip
- Resist Rework
Siconnex Worldwide
siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com
Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831
Email: america@siconnex.com
Siconnex America Inc.
2345 Route 52, Suite 2-C
12533 Hopewell Junction, New York, USA
Tel: +1 469 465 7831
Email: america@siconnex.com
83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54
Email: france@siconnex.com
3-2-17-202 Jiyugaoka
Meguro-ku Tokyo
152-0035 Tokyo
Tel: +81 343462435
Email: japan@siconnex.com
Siconnex Malaysia Sdn. Bhd.
No. 1 – 04 – 15 E-Gate Lebuh Tunku Kudin 2
11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568
Email: malaysia@siconnex.com
Siconnex Singapore Pte. Ltd.
60 Paya Lebar Rd. #05-07 Paya Lebar Square
409051 Singapore, Singapore
Tel: +65 31051762
Email: singapore@siconnex.com
