BATCHSPRAY®
Clean
Autoload

General features

Throughput up to 600 wph

Intelligent wafer handling meets experienced wafer processing.

Fully automated

A robot transfers the wafer batch from loadport into the process chamber.

4 process chambers

Clever assembly of process modules.

Footprint <12 m²

Small process module footprint combined with smart wafer handling.

Highly diluted single-use chemical

The inline spiking technology allows for spiking tiny amounts of acids into a DI water flow.

No sulfuric acid, no peroxide needed

Ozone replaces conventional medias and brings their applications of PR strip and Clean to its masterpiece.

Optional automation features

Dedicated handlers for dirty in/clean out handling

For enhanced wafer handling efficiency, we offer dedicated handlers specifically designed for dirty in/clean out processes. These specialized handlers ensure optimal cleanliness and prevent cross-contamination, maintaining the highest standards of wafer integrity.

Dedicated handlers for left and right process chamber

To capture your unique process requirements, our equipment includes dedicated handlers for both left and right process chambers. This tailored approach maximizes workflow flexibility, enabling seamless integration into your existing setup for improved productivity and convenience.

Wafer size

Feasible applications

Clean
Resist Strip
SicOzone

Suitable features

End point detection
BATCHSPRAY® Clean Autoload

Countable benefits

This four-chamber system features point-of-use mixed chemicals combined with the patented Retainer Comb Handling system to deliver superior process results. With sustainable processes like cleaning or resist stripping using SicOzone instead of peroxide and sulfuric acid, savings of up to 90% in the consumption of chemicals and DI water can be achieved.

0%
Savings of chemicals and DI water

Compared to conventional processes

Green Goals. Yellow Solutions.

Technology is all around us, shaping our daily lives and making them better. Siconnex is redefining progress by merging technology and sustainability, no longer presenting them as opposites. Sustainable technology for the progress of tomorrow. Green Goals. Yellow Solutions.

FAQs

The retainer combs are dedicated to a process chamber and they remain in the chamber while in idle mode.

We are here to listen.