RETAINER COMB HANDLING system.
Impressive advantages with the patented development from Siconnex.
The Retainer Comb Handling (RCH) system combines optimum process performance and simple design.
BATCHSPRAY® Autoload and the Retainer Comb Handling system can be combined with:
BATCHSPRAY® Acid / BATCHSPRAY® Solvent / BATCHSPRAY® Clean
The Retainer Comb Handling system lifts the whole batch at once including front and rear protective wafers. This means a batch of 27 12“ wafers or 52 8“ wafers can be handled simultaneously. To ensure the highest-possible process output, the batch is compressed with a single wafer handler to eliminate empty slots before the process starts. During the process, the Retainer Comb Handling system prepares the next batch on the wafer station for continuous processing. A significant advantage Retainer Comb Handling system‘s patented technology is that the same process conditions for temperature, flow and chemical exchange are guaranteed for every wafer thanks to the large opening area.
patent number: AT 515531 B1 2015-10-15 | DE 102015217132A1 | US 9,698,032 B2
- Compatible with all Siconnex equipment
- Suitable for 8“ and 12“ wafer sizes
- Opening area of more than 80% for optimum chemical exchange on the wafer
- Symmetrical design ensures minimal vibration, even with different loadings
- Retainer combs can be changed quickly, no instruction required
- Wafer detection on wafer handlers and wafer station
- Gem300 standard compatible
- Different applications possible depending on customer requirements
- separated handlers for dirty in/clean out handling
- separated handlers for a left and a right process chambe
Siconnex customized solutions GmbH
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
83 Rue roger du Marais
38430 Moirans, France
Tel: +33 631 30 55 54
Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2
11700 Gelugor Penang, Malaysia
Tel: +6 012 4256568
Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01
049908 Singapore, Singapore
Tel: +65 838 88977
Siconnex America Inc.
5445 Legacy Drive, Suite 120
75024 Plano, Texas, USA
Tel: +1 469 465 7831