Controlled wafer rotation combined with smart chemical spray gain leads to excellent uniformity.
Intelligent wafer handling meets experienced wafer processing.
A robot transfers the wafer batch from loadport into the process chamber.
Thanks to a clever assembly of process modules, we achieve two process chambers.
Small process module footprint combined with smart wafer handling.
Processes for SiC and GaN substrates are available.
Recirculation of the chemical provides a stable temperature and concentration condition.
Optional automation features
For enhanced wafer handling efficiency, we offer dedicated handlers specifically designed for dirty in/clean out processes. These specialized handlers ensure optimal cleanliness and prevent cross-contamination, maintaining the highest standards of wafer integrity.
To capture your unique process requirements, our equipment includes dedicated handlers for both left and right process chambers. This tailored approach maximizes workflow flexibility, enabling seamless integration into your existing setup for improved productivity and convenience.
Green Goals. Yellow Solutions.
Technology is all around us, shaping our daily lives and making them better. Siconnex is redefining progress by merging technology and sustainability, no longer presenting them as opposites. Sustainable technology for the progress of tomorrow. Green Goals. Yellow Solutions.
Cross contamination is prevented by the utilization of dedicated process modules and segregated wafer handling systems.