Siconnex
BATCHSPRAY® Acid

Efficiency has a name.

Siconnex BATCHSPRAY® Acid is designed for acids and bases. It can be loaded manually or combined with Siconnex BATCHSPRAY® Autoload. The system is completely closed, which means the operator is protected from direct contact with any chemicals. This makes the process safe and also environmentally friendly. Siconnex BATCHSPRAY® Acid can process wafer sizes from 50 mm to 300 mm.

Advantages

  • Automated dry-in, dry-out process
  • Five processes possible in one sequence
  • Repeatability thanks to process control
  • Equipment footprint of 1.2 m x 2 m
  • Up to 80% less DI water
  • Up to 80% reduction in process media
  • Closed system
  • User safety
  • Chemical mixing management system

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Etch

  • Metal Etch (Al, Cu, Ti, Au, Ni,…) with End Point Detection
  • III/V Etch (GaAs, AlGaAs, InGaP,…)
  • Oxide Etch
  • Freckle Etch
  • Silicon Etch
  • Ge Etch
  • Nitride Etch
  • UBM Etch
  • Glass Etch
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Clean

  • SicOzoneTM Clean
  • SicOzoneTM + Ultra Diluted Clean Applications
  • Contact Cleans
  • Organic Removal & Clean
  • Etch Residue Clean
  • Post Ash Residue Clean
  • HF Last
  • Prediffusion Cleans
  • Field Cleans (Organic & Inorganic Cleans)
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Resist Strip

  • SicOzoneTM Strip
  • Positive and Negative Resist Strip
  • Implanted Photo Resist Strip
  • Enhanced Strip
  • Resist Rework

The SicOzone™-Process

A win-win-win-situation

Cleans and strips resist from substrates.
No need for expensive solvents that are harmful to health.
Ozone is cheap to produce from oxygen.

All good things come in threes. In other words, it is a win-win-win situation!
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Siconnex Worldwide

Siconnex Austria

Siconnex customized solutions GmbH
Gewerbestrasse 2
5322 Hof bei Salzburg
Tel: +43 6229 36 646-0
Fax: +43 6229 36 646-146
Email: office@siconnex.com

Siconnex France

83 Rue roger du Marais
38430 Moirans
Tel: +33 631 30 55 54
Email: france@siconnex.com

Siconnex Malaysia

Siconnex Malaysia Sdn. Bhd.
No 1-04-15 e-Gate
Lebuh Tunku Kudin 2

11700 Gelugor Penang
Tel: +6 012 4256568
Email: malaysia@siconnex.com

Siconnex America

Siconnex America Inc.
3010 LBJ Freeway Suite 1200
75234 Dallas, Texas
Tel: +1 214 710 2469
Email: america@siconnex.com

Siconnex Singapore

Siconnex Singapore Pte. Ltd.
4 Battery Road
Bank of China Building #25-01

049908 Singapore
Tel: +65 838 88977
Email: singapore@siconnex.com

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