Navigation:

1: HOME
2: LITHOGRAPHY
- 2.1: Siconnex Vertical
  - 2.1.1: Coater Head.
  - 2.1.2: Developer Head.
  - 2.1.3: In-line.
  - 2.1.4: Vertical Video.
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- 2.2: DNS Track Systems
  - 2.2.1: Coater.
  - 2.2.2: Developer.
  - 2.2.3: In-line (Coat/Develop).
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- 2.3: Siconnex Training.
3: WET BATCH SPRAY
- 3.1: Spray Acid Tool.
- 3.2: Spray Solvent Tool.
- 3.3: Spin Rinse Dryer.
- 3.4: Siconnex Training.
4: SPARE PARTS
5: COMPANY
- 5.1: Mission.
- 5.2: Principles.
- 5.3: History.
- 5.4: Facilities (Photos)
  - 5.4.1: Building.
  - 5.4.2: Offices.
  - 5.4.3: Production.
  - 5.4.4: Laboratory.
  - 5.4.5: Warehouse.
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- 5.5: Job Opportunities.
- 5.6: Contact
  - 5.6.1: Map.
  - 5.6.2: Online-Contact Form.
  - 5.6.3: Legal Information.
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Content:

General Information

General Information about Spray Solvent Tool

: Siconnex SST

: Sample configuraion

Process Principle

Chemicals are sprayed on the spinning Substrates, then the batch is rinsed with demineralized and hot demineralized water and dried with hot nitrogen.

Application

Dissolve off any layer of a whole batch of wafers at once.
Clean and dry the wafers.

Processes Examples

Polymere removal (post etch residue)
Photo resist stripping
- Metal lift-off
and many more...

Advantages

: Tank cabinet

: Electrical cabinet

Reliable Hardware
- Siconnex Focus
- Components
- Operator Safety: Automated Dry-to-Dry Process
- Environmental friendly, less DIW & Exhaust Consumption
Fast Support
- Fully trained Field Service Engineer
- Software & Service Support
- Spare parts on stock
Process Knowledge
- Process Development
- Reliable
- Process Support
- Customized Process Hardware