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1: Site Map.
2: Contact.

Navigation:

1: HOME
2: SINGLE WAFER
- 2.1: Applications.
- 2.2: Coater, Developer.
- 2.3: Metal Lift Off (MLO).
- 2.4: Scrubber.
- 2.5: Watch Equipment VIDEO.
- 2.6: Training and Support.
3: BATCH SPRAY
- 3.1: Applications.
- 3.2: Spray Acid Tool
  - 3.2.1: Technical Information.
  - 3.2.2: Process Example.
  - 3.2.3: Process Rotor & Inserts for SAT 200.
  - 3.2.4: Watch Equipment Video.
  .
- 3.3: Spray Solvent Tool
  - 3.3.1: Technical Information.
  - 3.3.2: Process Rotor & Inserts for SST 200.
  .
- 3.4: Training and Support.
4: LABORATORY
5: SPARE PARTS & SERVICES
6: COMPANY
- 6.1: Global Locations.
- 6.2: Mission & Roadmap.
- 6.3: Process Laboratory.
- 6.4: Contact
  - 6.4.1: Map.
  - 6.4.2: Online-Contact Form.
  .
- 6.5: Job Opportunities.
- 6.6: Principles.
- 6.7: Legal Information.

1: Applications.
2: Spray Acid Tool
- 2.1: Technical Information.
- 2.2: Process Example.
- 2.3: Process Rotor & Inserts for SAT 200.
- 2.4: Watch Equipment Video.
.
3: Spray Solvent Tool.
4: Training and Support.

Content:

Spray Acid Tool

Automated
Dry to Dry
Batch Spray System

Main Applications

Metal Etch
Oxide Etch
Ti-Etch
Tungsten Etch
PDC (DHF, SC1, SC2)
Resist Strip
Freckle Etch

Process Example

(1) Load Wafer
(2) Al-Etch
(3) DIW Rinse
(4) Freckle Etch
(5) DIW Rinse
(6) Resist Strip
(7) DIW Rinse
(8) Dry Wafer

Advantages

Operator Safety
Closed automated System
Uniformities <3%
DIW Savings
End Point Detection