Skip content skip navigation

Content:

Wet Batch Spray

SPRAY ACID TOOL

  • Etching
  • Strip
  • Clean

SPRAY SOLVENT TOOL

  • Cleaning
  • Strip
  • Develop

SPIN RINSE DRYER

  • Rinse
  • Dry


Spray Acid Tool

Spray Solvent Tool

Spray Solvent Tool

Spin Rinse Dryer

PROCESS

  • Dry to Dry
  • Automated
  • Low DIW Consumtion
  • High Batch Uniformity
  • SeveralProcess Steps in 1 Tool

ADVANTAGES

  • Small Footprint
  • 2"-8" without conversion
  • DI Water Savings
  • Operator Safety