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<title>siconnex - Spray Acid and Solvent Tools - SAT SST SRD</title>
<link>http://www.siconnex.com/</link>
<description>siconnex offers Semitool semiconductor equipment like spray acid tool SAT and spray solvent tool SST as well as spin rinse dryer SRD. siconnex is your partner for wet batch process, DNS coater and developer as well as single wafer process, puddle or dispense process and spray process.</description>
<dc:publisher>siconnex customized solutions service GmbH</dc:publisher>
<dc:creator>siconnex customized solutions service GmbH</dc:creator>
<dc:date>2008-05-09T15:34:42</dc:date>
<dc:language>de</dc:language>
<dc:rights>(c) siconnex customized solutions service GmbH</dc:rights>
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<rdf:li rdf:resource="http://www.siconnex.com/wet-batch-spray/spray-solvent-tool/general-information/" />
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<rdf:li rdf:resource="http://www.siconnex.com/nc/spare-parts/overview/" />
<rdf:li rdf:resource="http://www.siconnex.com/lithography/dns-track-systems/" />
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<title>siconnex - Spray Acid and Solvent Tools - SAT SST SRD</title>
<url>http://www.siconnex.com/-/siconnex.gif</url>
<link>http://www.siconnex.com/</link>
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<item rdf:about="http://www.siconnex.com/wet-batch-spray/spray-solvent-tool/general-information/">
<title>General Information about Spray Solvent Tool</title>
<link>http://www.siconnex.com/wet-batch-spray/spray-solvent-tool/general-information/</link>
<description><![CDATA[<div style="display:block;"><a href="http://www.siconnex.com/wet-batch-spray/spray-solvent-tool/general-information/"><img src="http://www.siconnex.com/typo3temp/pics/0b2e76bdce.jpg" border="0" style="float:left; margin-right:2px; margin-bottom:2px;"></a></div>]]></description>
<dc:subject>General Information</dc:subject>
<dc:date>2008-03-10T08:39:58</dc:date>
</item>
<item rdf:about="http://www.siconnex.com/wet-batch-spray/spray-acid-tool/general-information/">
<title>General Information</title>
<link>http://www.siconnex.com/wet-batch-spray/spray-acid-tool/general-information/</link>
<description><![CDATA[<div style="display:block;"><a href="http://www.siconnex.com/wet-batch-spray/spray-acid-tool/general-information/"><img src="http://www.siconnex.com/typo3temp/pics/143b0fc7c2.jpg" border="0" style="float:left; margin-right:2px; margin-bottom:2px;"></a>The Siconnex spray acid tool (SAT) is an automated dry-to-dry wet batch system for etching processes. 
Ozone systems (resist strip) and endpoint-detection systems (automated etching control) can be implemented. </div>]]></description>
<dc:subject>General Information</dc:subject>
<dc:date>2008-01-30T14:18:00</dc:date>
</item>
<item rdf:about="http://www.siconnex.com/nc/spare-parts/overview/">
<title>Overview of our Spare Parts</title>
<link>http://www.siconnex.com/nc/spare-parts/overview/</link>
<description><![CDATA[<div style="display:block;"><div>
<table class='tab_intro' cellpadding='0' cellpadding='0' border='0'>
<caption>Siconnex provides spare parts and repairs<caption>
<!--
<tr>
	<td valign='top' class='tab_td_label'>Wet Batch Spray:</td>
	<td valign='top' class='tab_td_content1'>

	<div class='aufz1'><A HREF="/index.php?id=3&equipment=Semitool~1,2,3&eq=0">Semitool</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Semitool->Spray%20Solvent%20Tool~3&eq=2">Spray Acid Tool (SAT)</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Semitool->Spray%20Solvent%20Tool~3&eq=2">Spray Solvent Tool (SST)</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Semitool->Spin%20Rinse%20Dryer~2&eq=3">Spin Rinse Dryer     (SRD)</A></div>

	</td>

</tr>

<tr>
	<td valign='top' class='tab_td_label'>Lithography:</td>
	<td valign='top' class='tab_td_content1'>
	<div class='aufz1'><A HREF="/index.php?id=3&equipment=DNS~4,5&eq=4">Dainippon Screen (DNS)</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=DNS->Coater~4&eq=5">Coater</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=DNS->Developer~5&eq=6">Develop</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=DNS->Inline~4,5,6&eq=7">Inline</A></div>
	</td>
</tr>
-->


<tr>
	<td valign='top' class='tab_td_content1' colspan="2">


<table class='tab_intro' cellpadding='0' cellpadding='0' border='0'>
<tr><td>
	<div class='aufz1'><A HREF="/index.php?id=3&equipment=Siconnex~1,2,3,7&eq=0"><strong>Siconnex</strong></A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Siconnex->Spray%20Acid%20Tool~1&eq=1">Spray Acid Tool</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Siconnex->Spray%20Solvent%20Tool~3%20%20%20&eq=2">Spray Solvent Tool</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Siconnex->Spin%20Rinse%20Dryer~2&eq=3">Spin Rinse Dryer</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Siconnex->Vertical~7&eq=4">Vertical</A></div>
</td><td>&nbsp;</td><td style='padding-left:80px'>
	<div class='aufz1'><A HREF="/index.php?id=3&equipment=Semitool~8,9,10&eq=5"><strong>Semitool</strong></A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Semitool->Spray%20Acid%20Tool~8&eq=6">Spray Acid Tool</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Semitool->Spray%20Solvent%20Tool~10&eq=7">Spray Solvent Tool</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=Semitool->Spin%20Rinse%20Dryer~9&eq=8">Spin Rinse Dryer</A></div>



</td></tr></table>

	</td>

</tr>





<tr>
	<td valign='top' class='tab_td_content1' colspan="2" style='padding-left:150px'>

	<div class='aufz1'><A HREF="/index.php?id=3&equipment=DNS~4,5,6&eq=9"><strong>DNS</strong></A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=DNS->Coater~4&eq=10">Coater</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=DNS->Developer~5&eq=11">Develop</A></div>
	<div class='aufz2'><A HREF="/index.php?id=3&equipment=DNS->Inline~4,5,6&eq=12">Inline</A></div>

	</td>

</tr>



<tr>
	<td  colspan=2 valign='top' class='tab_td_contentu' align='center'>

         <br>

    	&nbsp;

	All spare parts are tested, qualified and come with warranty.<br>

Express shipment within 24 hours.<br>

Warehouse in Europe and Asia.

	</td>
</tr>


<tr>
	<td  colspan=2 valign='top' class='tab_td_content'>
	<table width="100%" align="center" class='tab_intro_pics' cellpadding='0' cellpadding='0' border='0'>
        	<tr>
         	<td><br></td>
         </tr>
         <tr>

		<td valign='top' width="20%">
                 	<a href="http://www.siconnex.com/index.php?id=3&submit_id_x=1&itemcode=SX-0-0117-0028"><img width="80" height="75" class='intropics' alt='TEFLON ROTOR' src='fileadmin/user_upload/images/spareparts/home/Teflonrotor.JPG'></a>
		</td>


		<td valign='top' width="20%">
                 	<a href="http://www.siconnex.com/index.php?id=3&submit_id_x=1&itemcode=SX-0-0117-0026"><img width="80" height="75" class='intropics' alt='STAINLESS STEEL ROTOR' src='fileadmin/user_upload/images/spareparts/home/RotorSS.JPG'></a>
		</td>


		<td valign='top' width="20%">
                 	<a href="http://www.siconnex.com/index.php?id=3&submit_descr_x=1&description=spin"><img width="80" height="75" class='intropics' alt='SPIN MOTOR / AC SERVO MOTOR' src='fileadmin/user_upload/images/spareparts/home/SpinMotorTypeA.jpg'></a>
		</td>


		<td valign='top'width="20%">
                 	<a href="http://www.siconnex.com/index.php?id=3&submit_descr_x=1&description=heat"><img width="80" height="75" class='intropics' alt='HEAT EXCHANGER' src='fileadmin/user_upload/images/spareparts/home/HeatExchanger.jpg'></a>
		</td>


		<td valign='top' width="20%">
                 	<a href="http://www.siconnex.com/index.php?id=3&submit_id_x=1&itemcode=SX-0-0214-0006"><img width="80" height="75" class='intropics' alt='EEW LAMPS' src='fileadmin/user_upload/images/spareparts/home/EEWLamp.jpg'></a>
		</td>


	</tr>

         <tr>
         <td valign='top' width="20%"><a href="http://www.siconnex.com/index.php?id=3&submit_id_x=1&itemcode=SX-0-0117-0028">Rotor PTFE</a></td>
         <td valign='top' width="20%"><a href="http://www.siconnex.com/index.php?id=3&submit_id_x=1&itemcode=SX-0-0117-0026">Rotor SS</a></td>
         <td valign='top' width="20%"><a href="http://www.siconnex.com/index.php?id=3&submit_descr_x=1&description=spin">Spin Motor</a></td>
         <td valign='top' width="20%"><a href="http://www.siconnex.com/index.php?id=3&submit_descr_x=1&description=heat">Heat Exchanger</a></td>
         <td valign='top' width="20%"><a href="http://www.siconnex.com/index.php?id=3&submit_id_x=1&itemcode=SX-0-0214-0006">EEW Lamp</a></td>

         </tr>
         </table>
	</td>
</tr>
<!--

<tr>
	<td valign='top' class='tab_td_label'>Quality:</td>
	<td valign='top' class='tab_td_content'>
	Standard Semiconductor quality ISO xxxxx:xxxx <br>
All spare parts and repairs have warranty. <br>
All spare parts were tested and qualified.<br>
	</td>
</tr>

<tr>
	<td valign='top' class='tab_td_label'>Lead time:</td>
	<td valign='top' class='tab_td_content'>
Warehouse in Europe and Asia.<br>
Express shipment within 24 hours.
	</td>
</tr>

-->

</table>
</div></div>]]></description>
<dc:subject>Overview</dc:subject>
<dc:date>2007-10-19T12:17:42</dc:date>
</item>
<item rdf:about="http://www.siconnex.com/lithography/dns-track-systems/">
<title>DNS Track Systems</title>
<link>http://www.siconnex.com/lithography/dns-track-systems/</link>
<description><![CDATA[<div style="display:block;">Siconnex offers 3 types of lithography tools:
<ul><li><link 25>Coaters</link>: coat wafers (i-line and DUV resist, PIQ, BCB, SOG, SOD)</li><li><link 27>Developers</link>: develop exposed wafers</li><li><link 26>In-line Tools</link>: coat/developer interfaced to stepper/scanner</li></ul></div>]]></description>
<dc:subject>DNS Track Systems</dc:subject>
<dc:date>2007-08-13T11:25:07</dc:date>
</item>
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