BATCH WAFER SPRAY SOLVENT PROCESSOR
The PRODUCE200 SOLVENT is capable to handle all solvent and solvent based chemicals up to 95°C. Up to 4 Chemical Storage Tanks allow uninterrupted automated processes including Rinsing and Drying (at 2000RPM). With a capacity of 50 Wafers per run, the PRODUCE 200 SOLVENT achieves a throughput of up to 150 Wafers per Hour.
ADVANTAGES
- Automated Dry in - Dry out
- Each Wafer - Fresh Chemistry
- Repeatable Process Control
- 1m x 1,6m Footprint
- 80% less DI Water
- 80% less Exhaust
- Encapsulated System
APPLICATIONS
- RESIST STRIP
- POLYMER REMOVAL
- CLEAN
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