BATCH WAFER SPRAY ACID PROCESSOR
The PRODUCE 200 ACID is capable to handle all acid and base materials up to 130°C.4 Chemical Storage Tanks allow uninterrupted automated processes including Rinsing and Drying. An optical End-Point Detection System ensures the required Run-to-Run performance. With a capacity of 50 Wafers per run, the PRODUCE200 Acid achieves a throughput of up to 120 Wafers per Hour.
ADVANTAGES
- Automated Dry in - Dry out
- 4 Chemicals in one Sequence
- Repeatable Process Control
- 1m x 1,6m Footprint
- 80% less Water
- 80% less Exhaust
- Encapsulated System
APPLICATIONS
- ETCH
- STRIP
- CLEAN
- SicOzone™
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