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BATCHSPRAY Solvent 

The BATCHSPRAY Solvent is capable to handle all solvent and solvent based chemicals up to 95°C. Up to 4 Chemical Storage Tanks allow uninterrupted automated processes including Rinsing and Drying (at 2000RPM). With a capacity of 50 Wafers per run, the BATCHSPRAY Solvent achieves a throughput of up to 150 Wafers per Hour.

PRODUCE 200 SOLVENT

ADVANTAGES

  • Automated dry in – dry out
  • Fresh and reclaim chemistry
  • Repeatable process control
  • Footprint 1m x 1.6m
  • 80 % less DI water
  • 80 % less waste
  • Encapsulated system
  • Operator safe

 

APPLICATIONS

  • CLEAN
  • RESIST STRIP
  • RESIST DEVELOPING

 

  

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