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Siconnex Vertical

Siconnex Vertical



The Siconnex Vertical is an automated single wafer platform for coating and developing processes.


Coater Head

Developer Head

 

 

Indexer Robotic

What are the benefits of the Siconnex Vertical

  • 200mm (8") track equipment with small footprint
  • new state of the art automation and control system
  • high throughput