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DNS Track Systems

Siconnex offers 3 types of lithography tools:

  • Coaters: coat wafers (i-line and DUV resist, PIQ, BCB, SOG, SOD)
  • Developers: develop exposed wafers
  • In-line Tools: coat/developer interfaced to stepper/scanner


DNS Coater 80B


DNS Developer 80B


DNS In-line 80B
(coater+developer)