Coater Tool Information
Process Principle
Precise coating for quarter-micron processes with up to 4 resist nozzles per coater-head.
Standard process: Vapor prime - Cool plate - Spin coating - Soft bake - Cool plate
Process Examples
- i-line resist
- DUV resist
- Polyimide
- Spin on glass (SOG)
- Spin on dielectric (SOD)