Skip content skip navigation

Content:

Coater Tool Information

Process Principle

DNS SC-W80A
Sample Configuration

Precise coating for quarter-micron processes with up to 4 resist nozzles per coater-head. 

Standard process: Vapor prime - Cool plate - Spin coating - Soft bake - Cool plate

Process Examples

  • i-line resist
  • DUV resist
  • Polyimide
  • Spin on glass (SOG)
  • Spin on dielectric (SOD)