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Content:

Spray Solvent Tool

 

 

Process:

  • Automated
  • Dry to Dry
  • Batch Spray System

Main Applications

  • Positive Resist Strip
  • Polymere Removal
  • Negative Resist Strip
  • Batch Develop

Advantages

  • Operator Safety
  • Closed automated System
  • Fresh and Used Process Chemicals

Process Example

  • (1)   Load Wafer
  • (2a) Strip (Solvent used)
  • (2b) Strip (Solvent fresh)
  • (3a) Clean (IPA used)
  • (3b) Clean (IPA fresh)
  • (4)   DIW Rinse
  • (5)   Dry Wafer