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SINGLE WAFER
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BATCH SPRAY
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Spray Acid Tool
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3.2.3:
Process Rotor & Inserts for SAT 200
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3.3:
Spray Solvent Tool
3.3.1:
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3.3.2:
Process Rotor & Inserts for SST 200
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1:
Applications
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2:
Coater, Developer
.
3:
Metal Lift Off (MLO)
.
4:
Scrubber
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5:
Watch Equipment VIDEO
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6:
Training and Support
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Content:
Scrubber
Equipment Platform: Vertical Single Level (SL)
Layout
Process
Jet Spray
Megasonic
Atomized Jet
with NH4OH or HF
137 Wafer/
h
3 Scrubber Heads
Scrub 70sec