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Content:

Coat, Develop, Inline

Equipment Platform: Vertical Multi Level (ML)

 

 

Coating

  • i-line Resist
  • DUV Resist
  • Polymide
  • SOG (Spin on Glass)
  • SOD (Spin on Dielectric)
  • BARC/TARC

Developing

  • i-line
  • DUV

Structures

  • 500nm
  • 250nm
  • 180nm