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1: Site Map.
2: Contact.

Navigation:

1: HOME
2: SINGLE WAFER
- 2.1: Applications.
- 2.2: Coater, Developer.
- 2.3: Metal Lift Off (MLO).
- 2.4: Scrubber.
- 2.5: Watch Equipment VIDEO.
- 2.6: Training and Support.
3: BATCH SPRAY
- 3.1: Applications.
- 3.2: Spray Acid Tool
  - 3.2.1: Technical Information.
  - 3.2.2: Process Example.
  - 3.2.3: Process Rotor & Inserts for SAT 200.
  - 3.2.4: Watch Equipment Video.
  .
- 3.3: Spray Solvent Tool
  - 3.3.1: Technical Information.
  - 3.3.2: Process Rotor & Inserts for SST 200.
  .
- 3.4: Training and Support.
4: LABORATORY
5: Spare parts & Services.
6: COMPANY
- 6.1: Global Locations.
- 6.2: Mission & Roadmap.
- 6.3: Process Laboratory.
- 6.4: Contact
  - 6.4.1: Map.
  - 6.4.2: Online-Contact Form.
  .
- 6.5: Job Opportunities.
- 6.6: Principles.
- 6.7: Legal Information.

A shortlist of all available spareparts

01. TREBOR 610 REPAIR KIT
02. VARIOUS IDI PUMPS
03. SENSOR; THERMOCOUPLE TYP J; 10FT *OBSOLETE SX-0-0209-0000* - 73082
04. HEAT EXCHANGER - REPAIR - 2-39-45750
05. HEAT EXCHANGER - REPAIR - 2-XA-10035
06. HEAT EXCHANGER - REPAIR - 2-XZ-10306
07. SEAL INFLAT .300. WHT VITON - 121R0001-505
08. CLAMSHELL TEFLON (PTFE)
09. WINDOW 270 LH & RH (UNIVERSAL) - 123R0013-546
10. SPIN MOTOR REPAIR FOR DNS TOOL 200 - 2-39-54184
11. SPIN MOTOR REPAIR FOR DNS TOOL 60A - 2-39-39334
12. SPIN MOTOR REPAIR FOR DNS TOOL 60A - 2-39-39335
13. SPIN MOTOR REPAIR FOR DNS TOOL 60A - 2-9P-00096
14. SPIN MOTOR REPAIR FOR DNS TOOL 80B (TYPE 2-39-74930 ) - 2-39-74930
15. SPIN MOTOR REPAIR FOR DNS TOOL 80B (TYPE 2-39-74930 ) - 2-9P-00098
16. SPIN MOTOR REPAIR FOR DNS TOOL 80B (SCRUBBER BACK SIDE MOTOR) - 2-39-53430
17. SPIN MOTOR REPAIR FOR DNS TOOL 80B (SCRUBBER BACK SIDE MOTOR) - 2-39-74931
18. SPIN MOTOR REPAIR FOR DNS TOOL 80B (SCRUBBER BACK SIDE MOTOR) - 2-39-82607
19. SPIN MOTOR REPAIR FOR DNS TOOL 80B (TYPE 2-39-45543) - 2-39-45543
20. SPIN MOTOR REPAIR FOR DNS TOOL 80B (TYPE 2-39-45543) - 2-9P-00098
21. 8-AXIS MOTOR DRIVER EEKA-0011(D2470) - 2-VC-15485
22. AXIS MOTOR DRIVER D2510 (EEKB-0011) - 2-39-55784
23. SERVO AMPLIFIER - REPAIR - 2-39-39303
24. SERVO AMPLIFIER - REPAIR - 2-39-48133
25. SERVO AMPLIFIER - REPAIR - 2-39-53462
26. VIDEO MEASURE CONTROLLER EEUE-001 - 2-VC-18989
27. HEATER CONTROLLER EEBH-0021X4B - 2-VC-17647-5
28. A2-CPU BOARD assy 9ECU-001A2 - 2-XZ-10337-1
29. AII-I/O BOARD for OVEN 9EI0-4021 - 2-VC-08900
30. BAKE BOARD ASSY CEBB-2011 - 2-VC-17799-1
31. BOARD CEFB-1012 IFC - 2-VC-15264-1
32. TRANSPORT BOARD VA2 TYPE CERB-0016 - 2-VC-15254-1
33. TRANSPORT CONNECTOR PANEL CERC-001 - 2-VC-09613
34. SPIN BOARD CESB-2011 - 2-VC-19075
35. SPIN BOARD CESB-2012 - 2-VC-19075-1
36. BOARD FOR BAKE 80BW EEBC-0012 - 2-VC-19116
37. BAKE BOARD EEBC-0013 - 2-VC-34409
38. INDEXER BOARD EEDC-0012 - 2-XZ-11840
39. IF-B BOARD EEIC-0012 - 2-VC-19284-2
40. TRANSPORT BOARD EERC-0011 - 2-VC-19090
41. TR BOARD EERC-0013 - 2-VC-P0058
42. SPIN BOARD EESC-0012 - 2-VC-19115
43. VARIOUS EEW-LAMPS - 2-39-56029
44. VARIOUS EEW-LAMPS - 2-39-56030
45. VARIOUS EEW-LAMPS - 2-39-69320
46. VARIOUS EEW-LAMPS - 2-39-69321
47. VALVE SOLENOID 24V - 61591
48. POWER SUPPLY MR 2015 - 2-39-45432
49. CP CONTROLLER FRD-4 - 2-39-45431
50. CHEMICAL TEMP. CONTROLLER INR-244-402 - 2-39-45751
51. TANKING SWITCH CONTROLLER CECC-2011 - 2-VC-09866-1
52. CHEMICAL CONTROLLER EEBH-0011 - 2-VC-16232
53. STATION CONTROLLER EEYC-0011 - 2-VC-20626
54. CHEMICAL CONTROLLER EECC-0111 - 2-VC-16233-1
55. LAMP HOUSE REPAIR FOR DNS TOOLS
56. LAMP HOUSE REPAIR FOR DNS TOOLS - 2-39-52009
57. LAMP HOUSE REPAIR FOR DNS TOOLS - 2-39-67077
58. LAMP HOUSE REPAIR FOR DNS TOOLS - 2-39-67078
59. LAMP HOUSE REPAIR FOR DNS TOOLS - 2-39-73890
60. LAMP HOUSE REPAIR FOR DNS TOOLS - 2-39-82981