Software - Secs II Gem
- Acces for 3 Levels (Service, Process, Operator)
- Siemens Controller
- Siemens Color Touchscreen
- 99 Recipes
- Resistivity Measurement
Wafer Handling & Process User Interface

| Safety
- Fire resistant Cover (Takiron, FRPP), according FM4910
- CE Certification
- Mechanical Door Lock
- Emergency Power Off Box (EPO)
Hardware Standards - DI Water Manifold Gasket
- DI-W Recirculation
- Rear Bowl Seal
- N2 Manifold
- N2 Pressure Sensors
- N2 cartridge heater
- Front panel indicator lights
- Teflon valve assembly
- Cartridge Ferro fluid Seal
- High flow, low pressure nozzles
- Bowl blanket heater w/ OT thermal switch
- Bowl blankets with OT and AT temp thermal switch
- Teflon drain tube
- Teflon supply lines (3/8” OD)
- Colour coded tubing
- Nylon barbed pneumatic fittings
- Chemical resistant Start/Stop switches
- Vibration dampeners
- Electropolished Bowl
- Brushless Motor
- Rotor Stop Positioner (RSP)
|