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Content:

Technical Information

Software

  • Secs II Gem
  • Acces for 3 Levels (Service, Process, Operator)
  • Siemens Controller
  • Siemens Color Touchscreen
  • 99 Recipes
  • Resistivity Measurement

Wafer Handling & Process

User Interface

Safety

  • Fire resistant Cover (Takiron, FRPP), according FM4910
  • CE Certification
  • Mechanical Door Lock
  • Emergency Power Off Box (EPO)

Hardware Standards

  • DI Water Manifold Gasket
  • DI-W Recirculation
  • Rear Bowl Seal
  • N2 Manifold
  • N2 Pressure Sensors
  • N2 cartridge heater
  • Front panel indicator lights
  • Teflon valve assembly
  • Cartridge Ferro fluid Seal
  • High flow, low pressure nozzles
  • Bowl blanket heater w/ OT thermal switch
  • Bowl blankets with OT and AT temp thermal switch
  • Teflon drain tube
  • Teflon supply lines (3/8” OD)
  • Colour coded tubing
  • Nylon barbed pneumatic fittings
  • Chemical resistant Start/Stop switches
  • Vibration dampeners
  • Electropolished Bowl
  • Brushless Motor
  • Rotor Stop Positioner (RSP)