Single Wafer Equipment
APPLICATIONS
- Metal Etch (Al, Cu)
- Metal Lift Off (MLO)
- Coat, Develop, Inline
- Scrubber (MegaSonic, AtomizedSpray, JetSpray)
- Scrubber & Chemicals
Batch Spray Equipment
APPLICATIONS
- Metal-Etch
- Resist Strip
- Oxide-Etch
- SicOzone™
- Pre Diffusion Clean
- Glass-Etch