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Single Wafer Equipment

 

 

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APPLICATIONS

  • Metal Etch (Al, Cu)
  • Metal Lift Off (MLO)
  • Coat, Develop, Inline
  • Scrubber (MegaSonic, AtomizedSpray, JetSpray)
  • Scrubber & Chemicals

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Batch Spray Equipment

 

 

 

 

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APPLICATIONS

  • Metal-Etch
  • Resist Strip
  • Oxide-Etch
  • SicOzone™
  • Pre Diffusion Clean
  • Glass-Etch

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Spare Parts & Services

 

 

 

 

 


SPARE PARTS & SERVICES

  • Siconnex
  • DNS
  • Semitool
  • All Parts are tested, qualified and come with Warranty

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